The Furon® UPM Slurry valve is a
3-way valve designed to meet the
rigorous demands in the transfer of
CMP slurries. The valve offers users
the confidence and reliability that
you expect in demanding
applications. The UPM Slurry valve
has been successfully tested and
proven reliable to 500,000 cycles in
Cabot Semi-Sperse® SS-25.
- The Furon® UPM Slurry valve is designed specifically to be used in highly aggressive slurry CMP applications.
- UPM Slurry valve is ideal for applications that demand high Cv flow factor
- Ideal for diverting slurry flow path
- Designed to handle up to 120 PSIG (827 kPa) forward pressure
When selecting Flare Grip® II ends, we recommend end connections that
are larger than the valve orifice size in order to achieve full flow.
This product is Class 100 clean room assembled and double bagged Pneumatic Air Port on top of valve has
standard 1/8" (3.18 mm) FNPT port. Leak detection port on side has standard port size of 1/4-28.