• Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals including concentrated hydrochloric acid (HCl) and de-ionized water
  • UPX 2000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
  • Distribution and point of use shutoff
  • Pneumatically actuated on/off valve using air pressure
  • Designed to handle up to 100 PSIG (690 kPa) pressure
When selecting either Flare Grip™, Flare Grip®II or Grab Seal™ ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
This product is class 100 clean room assembled and double bagged. Pneumatic Air Port on top of valve has standard 1/8" (3.18mm) FNPT port. Leak detection port on side has standard port size of 1/4-28.