Description
The Furon® UPM Slurry valve is a 3-way valve designed to meet the rigorous demands in the transfer of CMP slurries. The valve offers users the confidence and reliability that you expect in demanding applications. The UPM Slurry valve has been successfully tested and proven reliable to 500,000 cycles in Cabot Semi-Sperse® SS-25.

Applications
  • The Furon® UPM Slurry valve is designed specifically to be used in highly aggressive slurry CMP applications.
  • UPM Slurry valve is ideal for applications that demand high Cv flow factor
  • Ideal for diverting slurry flow path
  • Designed to handle up to 120 PSIG (827 kPa) forward pressure
Notes
When selecting Flare Grip® II ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
This product is Class 100 clean room assembled and double bagged Pneumatic Air Port on top of valve has standard 1/8" (3.18 mm) FNPT port. Leak detection port on side has standard port size of 1/4-28.
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Item #

Orifice

End Connection

Port Size

A - Length

B - Height

C - Height

UPM3-71212-VI-SY N/A 3/4 in N/A Fuse-Bond™ N/A 3/4 in N/A 5.90 in149.86 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM3-71216-VI-SY N/A 3/4 in N/A Fuse-Bond™ N/A 1 in N/A 5.80 in147.32 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM3-F1212-VI-SY N/A 3/4 in N/A Flare Grip® II N/A 3/4 in N/A 6.31 in160.33 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM3-F1216-VI-SY N/A 3/4 in N/A Flare Grip® II N/A 1 in N/A 6.90 in175.26 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
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