Description
The Furon® UPM 1000 Slurry valve is a 2-way valve designed to meet the rigorous demands in the transfer of CMP slurries. The valve offers users the confidence and reliability that you expect in demanding applications. The UPM Slurry valve has been successfully tested and proven reliable to 500,000 cycles in Cabot Semi-Sperse® SS-25.

Applications
  • Designed for primary use in the Semiconductor industry for transfer of highly aggressive CMP slurry applications
  • Distribution and point of use shutoff
  • Pneumatically actuated on/off valve using air pressure
  • Designed to handle up to 120 PSIG (827 kPa) pressure
Notes
When selecting Flare Grip® II ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
This product is Class 100 clean room assembled and double bagged.
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Item #

Orifice

End Connection

Port Size

A - Length

B - Height

C - Height

UPM2-71212NC-VI-SY N/A 3/4 in N/A Fuse-Bond™ N/A 3/4 in N/A 5.90 in149.86 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM2-71216NC-VI-SY N/A 3/4 in N/A Fuse-Bond™ N/A 1 in N/A 5.80 in147.32 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM2-F1212NC-VI-SY N/A 3/4 in N/A Flare Grip® II N/A 3/4 in N/A 6.31 in160.33 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
UPM2-F1216NC-VI-SY N/A 3/4 in N/A Flare Grip® II N/A 1 in N/A 6.90 in175.26 mm N/A 1.88 in47.70 mm N/A 4.22 in107.21 mm
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