The Furon® UPM 1000 Slurry valve is
a 2-way valve designed to meet the
rigorous demands in the transfer of
CMP slurries. The valve offers users
the confidence and reliability that
you expect in demanding
applications. The UPM Slurry valve
has been successfully tested and
proven reliable to 500,000 cycles in
Cabot Semi-Sperse® SS-25.
- Designed for primary use in the Semiconductor industry for transfer of highly aggressive CMP slurry applications
- Distribution and point of use shutoff
- Pneumatically actuated on/off valve using air pressure
- Designed to handle up to 120 PSIG (827 kPa) pressure
When selecting Flare Grip® II ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
This product is Class 100 clean room assembled and double bagged.