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High Purity Valves

The comprehensive line of Furon® valves is designed with state-of-the-art, patent-protected technology, providing optimal performance in handling fluid delivery applications that involve highly aggressive, corrosive, ultrapure chemicals. The industry proven Furon® valves are constructed from injection molding high-purity PFA and virgin PTFE. This ensures the ultimate in system media purity.

  • High purity injection molded PFA or PTFE components
  • Meets SEMI F57 guidelines
  • Industry proven designs provide the highest level of reliability
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    Furon® UPM 1000 Valve

    Furon® UPM 1000 Valve

    Designed for transfer of highly aggressive ultrapure chemicals and de-ionized water, the Furon® UPM series is ideal for applications that demand high-pressure capabilities and a high Cv flow factor. The Furon® UPM Series Valves are available with visual position indicators, permitting easy identification of open and closed positions.

    The optional UPM Slurry Valve is designed and tested specifically for aggressive slurry applications and is offered in 2 and 3-way configurations. Also available is the Furon® UPM High Temperature Valve engineered for applications with media temperatures up to 150° C.

    2-way and 3-way high purity PFA valves
    Pneumatic, Manual Quarter Turn, and Manual Multi-turn
    1/4", 1/2" and 3/4" Orifice


    Furon® UPX 2000 Valve

    Furon® UPX 2000 Valve

    The UPX-2000 combines a high performance valve with latest materials technology to provide you with maximum system uptime. The proprietary Furon SCR spring has proven reliable in the most aggressive HCl applications, while providing a 100% high-purity PFA and PTFE wetted flow path. Its patent protected diaphram assembly eliminates potential leak paths with its unique design. For the ultimate performing valve in your ultra pure fluid handling system, specify the Furon UPX-2000 for added assurance.

    2-way and 3-way high purity PFA valves
    Pneumatic, Manual Quarter Turn, and Manual Multi-turn
    1/4", 1/2" and 3/4" Orifice


    Furon® HPV High Performance Diaphragm Valve

    Furon® HPV High Performance Diaphragm Valve

    The HPVM Molded Valve was developed to add critical features including visual indication and standard FlareGrip® II end connections to the robust HPV machined version.

    This pneumatically actuated 2-way diaphragm valve is ideal for critical high purity and corrosive chemical process applications requiring proven reliability at a competitive price. Its compact profile makes the HPVM the ideal choice where footprint reduction is a primary design constraint.

    2-way and 3-way high purity PFA valves
    Pneumatic, Manual Quarter Turn, and Manual Multi-turn
    1/4" Orifice


    Furon® CDV-1000 Compact Diaphragm Valve

    Furon® CDV-1000 Compact Diaphragm Valve

    Combining a small footprint with high media pressure capacity and high Cv, the CDV-1000 is ideal for semiconductor process, high purity and corrosive chemical applications requiring a compact design and high flow rating.Constructed of injection-molded, high-purity PFA-wetted flow path with virgin PTFE diaphragm, the ultrapure design of the CDV-1000 utilizes our patent protected rolling diaphragm technology.

    This 1/2" orifice valve is offered in manual or pneumatic actuated 2-way and multi-turn configurations required to meet a wide range of customer requirements.

    2-way and 3-way high purity PFA and PTFE valves
    Pneumatic and Manual Multi-turn
    1/2" Orifice


    Furon® J-Series Valve

    Furon® J-Series Valve

    The Furon® J-Series ¾" orifice valve offers a high Cv flow factor and high-pressure capabilities in a compact package required by process equipment manufacturers.

    Available in both manually and pneumatically actuated 2-way versions, the J-Series Valve features injection-molded, high-purity PFA-wetted flow path with virgin PTFE diaphragm and has been qualified at over two million cycles. In addition, the J-Valve features a smaller footprint than competitive valves with similar flow capabilities.

    2-way high purity PFA chemical distribution valves
    Pneumatic, Manual Toggle, and Manual Multi-turn
    3/4" Orifice


    Furon® RDVM and SMDVM Self-Manifolding Distribution Valves

    Furon® RDVM and SMDVM Self-Manifolding Distribution Valves

    Furon® high-purity, injection-molded RDV/SMDV Rolling Diaphragm Valves are ideal for applications that demand high Cv flow factor. These valves feature a smaller footprint required by cost-conscious customers. Universal fittings allow customers to order one standard valve, which means smaller volume inventory requirements. Primary applications include high-purity chemical and slurry delivery for chip makers, bulk chemical distribution systems, valve boxes and chemical processing companies. Available in both manual and pneumatic models

    2-way high purity PFA chemical distribution valves
    Pneumatic, Manual Quarter Turn, and Manual Multi-turn
    1/4" Orifice


    Furon® MCVM Mini & LCVM Large Check Molded Valve

    Furon® MCVM Mini & LCVM Large Check Molded Valve

    The Mini and Large Check Molded Valve is an injection molded, high-purity valve constructed of 100% non-metallic materials, and featuring a PFA-wetted flow path. Assembled and double-bagged in a Class 100 clean room, the valve is 100% tested for operation. The MCVM and LCVM prevents back flow in process delivery manifolds as well as drain down in chemical delivery lines. It is designed for use in semiconductor process, high purity, and corrosive chemical applications.

    One way media actuated high purity valves
    High purity PFA and PTFE construction
    Metal-free design


    Furon® Q-Valve

    Furon® Q-Valve

    The injection-molded Furon Q-Valve was developed to provide you with a high performance, low cost solution that insures reliable fluid delivery to critical process applications. Innovations such as Saint-Gobain's patented Rolling Diaphragm Technology enable maximum flow and pressure ratings while optimizing safety.

    Available in 1/4" and 1/2" sizes, the Q-Valve offers "drop-in" replacement capability that meets or exceeds competitive product offering's performance and function.

    Combined with a red position indicator, the Q-Valve features transparent upper components ideal for easy assessment of the valve's condition.

    2-way high purity PFA valves
    Pneumatic, Manual Quarter Turn, and Manual Multi-turn
    1/4" and 1/2" Orifice


    Furon® ChemPure™ 2'' In-Line Valve

    Furon® ChemPure™ 2" In-Line Valve

    When maximum flow is critical to your high purity application, the Furon® ChemPure™ 2" In-Line Valve can deliver. Using our patent-protected rolling diaphragm technology and straight-through flow design, the Furon® 2" In-Line Valve supports maximum flow efficiency and ease of installation. Additionally, "No O-Ring Union" end connections eliminate dead space and electrometric contamination. Designed for use in semiconductor chemical delivery, chemical processing, high purity and corrosive chemical applications, the 2" In-Line Valve is available in both manually and pneumatically actuated versions.

    2-way high purity PTFE valves
    Pneumatic and Manual Multi-turn
    2" Orifice, Cv up to 52.0


    Other AstiPure™ & Furon® Valves

    Other AstiPure™ & Furon® Valves

    See additional Furon® and AstiPure™ high purity valves
    Semiconductor, Pharmaceutical, Laboratory, Life Science and Industrial applications