• Furon® UPM 1000 Diaphragm Valve Pneumatically Actuated, 3-Way

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals and de-ionized water
    • UPM 1000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
    • Ideal for diverting media flow path
    Operation
    • Pneumatically actuated 3 way valve allows for common input and alternating output
    • Engineered to operate up to 100 PSIG (690 kPa) forward pressure
    Notes
    This product is class 100 clean room assembled and double bagged. Pneumatic Air Port on top of valve has standard 1/8" (3.18mm) FNPT port. Leak detection port on side has standard port size of 1/4-28.
    Saint-Gobain Performance Plastice reserves the right to change product specifications without prior notice.

    For applications in concentrated hydrochloric acid, (HCI), please consult the factory.

  • Furon® UPM 1000 Diaphragm Valve Pneumatically Actuated, 2-Way

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals and de-ionized water
    • UPM 1000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
    • Distribution and point of use shutoff
    Operation
    • Pneumatically actuated on/off valve using air pressure
    • Designed to handle up to 100 PSIG (689 kPa) pressure
    Notes
    This product is class 100 clean room assembled and double bagged.

  • Furon® UPM 1000 Diaphragm Valve Manually Actuated, 2-Way

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals and de-ionized water
    • UPM 1000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
    Operation
    • Manually operated on/off valve, quarter turn
    • Designed to handle up to 100 PSIG (690 kPa) pressure
    Notes
    When selecting either Flare Grip® or Grab Seal™ ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
    This product is class 100 clean room assembled and double bagged.
    Leak detection port on side has standard port size of 1/4 -28.

    For applications in concentrated HCI (Hydrochloric Acid) please consult the factory.

  • Furon® UPM 1000 Diaphragm Valve Pneumatically Actuated, 2-Way

    Description
    The Furon® UPM 1000 Slurry valve is a 2-way valve designed to meet the rigorous demands in the transfer of CMP slurries. The valve offers users the confidence and reliability that you expect in demanding applications. The UPM Slurry valve has been successfully tested and proven reliable to 500,000 cycles in Cabot Semi-Sperse® SS-25.

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive CMP slurry applications
    • Distribution and point of use shutoff
    • Pneumatically actuated on/off valve using air pressure
    • Designed to handle up to 120 PSIG (827 kPa) pressure
    Notes
    When selecting Flare Grip® II ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
    This product is Class 100 clean room assembled and double bagged.

  • Furon® UPM 1000 Diaphragm Valve Manually Actuated, 2-Way Multi-Turn

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals and de-ionized water
    • UPM 1000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
    • Performs throttling functions to reduce flow rates upstream from sensitive devices such as filters
    • Volumetric control in process tank overflow and refresh rates
    • Performs approximate metering functions
    Operation
    • Manually operated multi-turn throttle valve
    • Designed to handle up to 100 PSIG (690 kPa) pressure
    Notes
    This product is class 100 clean room assembled and double bagged. Leak detection port on side has standard port size of 1/4 -28

    For applications in hydrochloric acid (HCI), please consult the factory.

  • Furon® UPM 1000 Diaphragm Valve Manually Actuated, 3-Way Multi Turn

    Applications

    • Designed for primary use in the Semiconductor industry for transfer of highly aggressive ultrapure chemicals and de-ionized water
    • UPM 1000 series valve is ideal for applications that demand high-pressure capabilities and a high Cv flow factor
    • Provide a convenient way of mixing compatible fluids that do not have strict mixing ratio requirements
    Operation
    • Manually operated diverting/mixing valve
    • Designed to handle up to 100 PSIG (690 kPa) forward pressure
    Notes
    When selecting either Flare Grip® or Grab Seal™ ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
    This product is class 100 clean room assembled and double bagged.
    Leak detection port on side has standard port size of 1/4-28.
    Saint-Gobain Performance Plastics reserves the right to change product specifications without prior notice.

    For applications in concentrated hydrochloric acid, (HCI), please consult the factory

  • Furon® UPM 1000 Diaphragm Valve, Slurry Option Pneumatically Actuated 3-Way

    Description
    The Furon® UPM Slurry valve is a 3-way valve designed to meet the rigorous demands in the transfer of CMP slurries. The valve offers users the confidence and reliability that you expect in demanding applications. The UPM Slurry valve has been successfully tested and proven reliable to 500,000 cycles in Cabot Semi-Sperse® SS-25.

    Applications

    • The Furon® UPM Slurry valve is designed specifically to be used in highly aggressive slurry CMP applications.
    • UPM Slurry valve is ideal for applications that demand high Cv flow factor
    • Ideal for diverting slurry flow path
    • Designed to handle up to 120 PSIG (827 kPa) forward pressure
    Notes
    When selecting Flare Grip® II ends, we recommend end connections that are larger than the valve orifice size in order to achieve full flow.
    This product is Class 100 clean room assembled and double bagged Pneumatic Air Port on top of valve has standard 1/8" (3.18 mm) FNPT port. Leak detection port on side has standard port size of 1/4-28.