(4) Applications • Designed for use in the delivery of high purity chemical in corrosive semiconductor applications • Ideal for applications which require both a high Cv factor and minimum footprint • High-purity media pressure applications • Totally inert, all-PTFE/PFA, fully swept flow path • Adjusts flow rates for volumetric control in process applications • Protects sensitive devices, such as filters, from hydraulic shock due to soft open and closure capability minimum footprint • No hold-up volume; complete drain down
(2) Applications • Designed for use in the delivery of high purity chemical in corrosive semiconductor applications • Ideal for applications which require both a high Cv factor and minimum footprint
